Freeformed optical surfaces without rotational symmetry allow the implementation of completely new concepts for optical systems. The use of freeforms reduces the number of elements in an optical system, allowing smaller, lighter and more efficient systems...
Camera systems for controlling microchip components
With the help of high-quality camera systems, it is possible to inspect the surfaces of wafers and detect the smallest deviations from the optimum surface. Wafers are square or circular thin disks that serve as a base plate for the deposition of electronic components. Wafers are used in various areas, e.g. in photovoltaics, micromechanics and the semiconductor industry. The requirements for wafer inspections are very high, as extremely detailed measurements of wafer microstructures down to the nanometer range have to be generated. In addition, very precise control of the UV radiation and the associated correct selection of the wavelength is extremely important in order to achieve ideal measurement results.
Due to technical progress and intensive research work, the electronic components installed on wafers and the resulting products (e.g. microchips) are constantly growing. The increasing complexity and density of the structures associated with this makes resolution more difficult. State-of-the-art camera systems, which are used for quality control of wafers, have to meet these high requirements from year to year. Only in this way can unevenness, (micro)cracks, humps or coating defects be reliably detected during inspection of the wafer material or its surface and displayed on a screen.
High-quality optical components form the basis for high-performance camera systems. The best imaging results can be achieved, for example, with freeform surface systems or aspherical lenses. Pin sharp details, compensation of spherical aberration and precise measurements can be achieved with aspheric lenses or freeforms from asphericon. According to your requirements, the production of individual UV-VIS lenses for an effective quality assurance of your wafer inspection systems is easily possible. Reliable process monitoring can thus be guaranteed even with simultaneously high wafer throughput rates. Thermal as well as mechanical test procedures of our in-house environmental tests fully confirm the high quality of our products.
asphericon's optical elements and systems guarantee the highest imaging quality and complement your optical systems to your complete satisfaction. Defective products can be reliably detected and sorted out for a smooth inspection process. Feel free to contact us!
Looking for a custom solution? Discover our customized aspheres with unsurpassed surface quality.
Custom Aspheres at a gance
- Customized aspheric optics for UV/VIS/IR range
- Individual optical designs for for all types of applications
- Diffraction-limited quality with a Strehl ratio up to 0.99
- Outstanding surface quality with roughness values as low as 5 Å
- High-end optical coatings
Choose between asphericon a|High-NA, a|Low-NA and a|UV-grade fused silica. Thanks to CNC polishing and grinding this aspheric lens meets the highest demands on production quality and tolerance.
a|Aspheres at a gance
- Precision polished Aspheres (a|High-NA, a|Low-NA and a|FusedSilica)
- CNC grinding & polishing for superior surface roughness
- Materials: S-LAH64, N-BK7, FusedSilica
- Diameter: 10 mm bis 100 mm
- Off-the-shelf delivery for short lead times
A wide range of measuring instruments is used to achieve accurate measuring results. The specially developed and integrated database system enables measurement results from all manufacturing steps to be documented...